Patent Application
Utility
App. No. 14/082,282
· Confirmation No. 3911
PLASMA MEDIATED ASHING PROCESSES
Applicant:
Lam Research Corporation
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-12-13 | ABN |
Abandonment | 2 | View | |
| 2016-06-13 | CTAV |
Advisory Action (PTOL-303) | 5 | View | |
| 2016-06-13 | INTV.SUM.APP |
Applicant Initiated Interview Summary (PTOL-413) | 2 | View | |
| 2016-06-13 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2016-06-13 | A.NE.AFCP.D |
After Final Consideration Program Decision | 1 | View | |
| 2016-06-01 | INTV.SUM.APP |
Applicant Initiated Interview Summary (PTOL-413) | 3 | View | |
| 2016-06-01 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 29 | View | |
| 2016-05-31 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-05-31 | A.NE.AFCP |
After Final Consideration Program Request | 2 | View | |
| 2016-05-31 | A.NE |
Response After Final Action | 1 | View | |
| 2016-05-31 | CLM |
Claims | 5 | View | |
| 2016-05-31 | REM |
Applicant Arguments/Remarks Made in an Amendment | 13 | View | |
| 2016-05-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-04-07 | CTFR |
Final Rejection | 22 | View | |
| 2016-04-07 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-04-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-04-07 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2016-03-09 | INTV.SUM.APP |
Applicant Initiated Interview Summary (PTOL-413) | 3 | View | |
| 2016-03-09 | OA.APPENDIX |
Office Action Appendix | 13 | View | |
| 2016-02-25 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2016-02-25 | CLM |
Claims | 5 | View | |
| 2016-02-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 9 | View | |
| 2016-02-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-02-25 | OATH |
Oath or Declaration filed | 2 | View | |
| 2016-02-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-02-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-02-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2015-12-30 | CTNF |
Non-Final Rejection | 15 | View | |
| 2015-12-30 | 892 |
List of references cited by examiner | 1 | View | |
| 2015-12-30 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2015-12-30 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2015-12-30 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2015-12-30 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2015-01-02 | OATH |
Oath or Declaration filed | 5 | View | |
| 2015-01-02 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-03-20 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2013-12-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-12-09 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-12-09 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 1 | View | |
| 2013-12-09 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2013-12-06 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2013-12-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-12-06 | TRAN.LET |
Transmittal Letter | 5 | View | |
| 2013-11-18 | A.PE |
Preliminary Amendment | 1 | View | |
| 2013-11-18 | SPEC |
Specification | 1 | View | |
| 2013-11-18 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2013-11-18 | PA.. |
Power of Attorney | 2 | View | |
| 2013-11-18 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-11-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2013-11-18 | ADS |
Application Data Sheet | 8 | View | |
| 2013-11-18 | SPEC |
Specification | 38 | View | |
| 2013-11-18 | CLM |
Claims | 4 | View | |
| 2013-11-18 | ABST |
Abstract | 1 | View | |
| 2013-11-18 | DRW |
Drawings-only black and white line drawings | 16 | View | |
| 2013-11-18 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Ivan L. Berry
Amesbury, MA
Carlo Waldfried
Middleton, MA
Shijian Luo
South Hamilton, MA
Orlando Escorcia
Falls Church, VA
Attorneys & Agents of Record
Classification
USPC
134/1.1
H10P70/80
G03F7/427
H10P50/287
Prosecution
- Examiner
- CATHEY JR, DAVID A
- Art Unit
- 1713
- Customer No.
- 91286
- Docket No.
- NVLS008045-3US
- Confirmation No.
- 3911
Publication
- Pub. No.
- US20140076353A1
- Pub. Date
- 2014-03-20
Parent
is a Division of
→
App. 13/117,488
Filed 2011-05-27
· Abandoned -- Failure to Respond to an Office Action
Parent
is a Continuation in-part of
→
App. 12/844,193
Filed 2010-07-27
· Abandoned -- Failure to Respond to an Office Action
Parent
is a Continuation in-part of
→
App. 12/275,394
Filed 2008-11-21
· Abandoned -- Failure to Respond to an Office Action
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 14/082,282
- Filed
- 2013-11-18
- Pub. No.
- US20140076353A1
- Examiner
- CATHEY JR, DAVID A
- Art Unit
- 1713
External Links