Patent Assignment
Reel/Frame 031580/0176
Assignment of Assignor's Interest
Recorded: 2013-11-12
Pages: 6
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma Generating Apparatus and Process for Simultaneous Exposure of a Workpiece to Electromagnetic Radiation and Plasma
Application:
13/335,889 →
Publication:
US 2013/0160793
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.