IP Library Assignment 026418/0791
Patent Assignment
Reel/Frame 026418/0791

Assignment of Assignor's Interest

Recorded: 2011-06-09 Pages: 3
Assignors
LEE, WILLIAM D.
Executed: 2011-05-26
PUROHIT, ASHWIN M.
Executed: 2011-06-01
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property (1)
Matched Coefficient of Thermal Expansion for an Electrostatic Chuck
Patent: 9,048,276 →
Application: 13/116,732 →
Publication: US 2011/0292562
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Second Amendment to Ipsa Mar 7, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 027824/0767 →
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →