Patent Assignment
Reel/Frame 026353/0190
Assignment of Assignor's Interest
Recorded: 2011-05-27
Pages: 7
Assignors
KURUNCZI, PETER F.
Executed: 2011-05-12
SINCLAIR, FRANK
Executed: 2011-05-12
BILOIU, COSTEL
Executed: 2011-05-18
GODET, LUDOVIC
Executed: 2011-05-26
ALLEN, ERNEST E.
Executed: 2011-05-12
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Plasma Attenuation for Uniformity Control