Patent Assignment
Reel/Frame 026355/0916
Assignment of Assignor's Interest
Recorded: 2011-05-27
Pages: 2
Assignor
PUGGL, MICHAEL
Executed: 2011-05-02
Assignee
LAM RESEARCH AG
SEZ STRASSE 1, VILLACH, A-9500, AUSTRIA
Covered Property
(1)
Method and Apparatus for Liquid Treatment of Wafer Shaped Articles