Patent Assignment
Reel/Frame 026361/0139
Assignment of Assignor's Interest
Recorded: 2011-05-31
Pages: 3
Assignors
KANG, MICHAEL
Executed: 2011-05-26
PATERSON, ALEX
Executed: 2011-05-27
KENWORTHY, IAN J.
Executed: 2011-05-26
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Gas Distribution Showerhead for Inductively Coupled Plasma Etch Reactor