Patent Assignment
Reel/Frame 026362/0960
Assignment of Assignor's Interest
Recorded: 2011-05-31
Pages: 3
Assignors
HASEBE, KAZUHIDE
Executed: 2011-05-02
MURAKAMI, HIROKI
Executed: 2011-05-02
KAKIMOTO, AKINOBU
Executed: 2011-05-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Amorphous Silicon Film Formation Method and Amorphous Silicon Film Formation Apparatus