Patent Assignment
Reel/Frame 026363/0564
Assignment of Assignor's Interest
Recorded: 2011-05-31
Pages: 2
Assignors
ZAAL, KOEN JACOBUS JOHANNES MARIA
Executed: 2006-02-16
OTTENS, JOOST JEROEN
Executed: 2006-02-16
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method