Patent Assignment
Reel/Frame 026366/0267
Confirmatory License
Recorded: 2011-06-01
Pages: 2
Assignor
NORTHWESTERN UNIVERSITY
Executed: 2011-02-22
Assignee
NATIONAL SCIENCE FOUNDATION
4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230
Covered Property
(1)
Force Feedback Leveling of Tip Arrays for Nanolithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.