Patent Assignment
Reel/Frame 026383/0986
Assignment of Assignor's Interest
Recorded: 2011-06-03
Pages: 4
Assignors
LIN, XING
Executed: 2011-05-03
BUCHBERGER, DOUGLAS A., JR.
Executed: 2011-05-03
ZHOU, XIAOPING
Executed: 2011-05-10
TODOROW, VALENTIN
Executed: 2011-05-03
NGUYEN, ANDREW
Executed: 2011-05-05
SHEYNER, ANCHEL
Executed: 2011-05-03
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Controlling Substrate Temperature in a Process Chamber