Patent Assignment
Reel/Frame 026386/0496
Assignment of Assignor's Interest
Recorded: 2011-06-03
Pages: 3
Assignors
YAMAZAKI, SHUNPEI
Executed: 2011-05-11
TAKAYAMA, TORU
Executed: 2011-05-23
SATO, MIZUHO
Executed: 2011-05-18
UTO, NORIAKI
Executed: 2011-05-23
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method of Manufacturing Soi Substrate