Patent Assignment
Reel/Frame 026391/0768
Assignment of Assignor's Interest
Recorded: 2011-05-16
Pages: 3
Assignee
MICRONIC MYDATA AB
BOX 3141 NYTORPSVAGEN 9, TABY, SE-183 03, SWEDEN
Covered Property
(1)
Method and Apparatus for Alignment Optimization with Respect to Plurality of Layers