Patent Assignment
Reel/Frame 026399/0001
Assignment of Assignor's Interest
Recorded: 2011-06-07
Pages: 3
Assignors
ABEN, MARIA JOHANNA HENDRIKA
Executed: 2011-05-16
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2011-05-17
WRIGHT, NOELLE MARTINA
Executed: 2011-05-17
ALVAREZ SANCHEZ, RUBEN
Executed: 2011-05-16
SLOB, MARTIJN JAAP DANIEL
Executed: 2011-05-19
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Measuring a Structure on a Substrate, Computer Program Products for Implementing Such Methods and Apparatus