Patent Assignment
Reel/Frame 026402/0604
Assignment of Assignor's Interest
Recorded: 2011-06-07
Pages: 4
Assignors
STROESSNER, ULRICH
Executed: 2011-05-16
KLOSE, GERD
Executed: 2011-06-07
TOTZECK, MICHAEL
Executed: 2011-05-27
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method and Apparatus for Measuring Structures on Photolithography Masks
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.