Patent Assignment
Reel/Frame 026406/0988
Assignment of Assignor's Interest
Recorded: 2011-06-08
Pages: 3
Assignor
CHIDA, AKIHIRO
Executed: 2011-05-27
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device