Patent Assignment
Reel/Frame 026407/0681
Assignment of Assignor's Interest
Recorded: 2011-06-07
Pages: 5
Assignors
DHANDAPANI, SIVAKUMAR
Executed: 2011-05-06
QIAN, JUN
Executed: 2011-05-06
COCCA, CHRISTOPHER D.
Executed: 2011-05-02
FUNG, JASON G.
Executed: 2011-05-06
CHANG, SHOU-SUNG
Executed: 2011-05-06
GARRETSON, CHARLES C.
Executed: 2011-05-23
MENK, GREGORY E.
Executed: 2011-05-06
TSAI, STAN D.
Executed: 2011-05-06
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, USA 95054
Covered Property
(1)
Closed-Loop Control for Improved Polishing Pad Profiles