Patent Assignment
Reel/Frame 026425/0606
Assignment of Assignor's Interest
Recorded: 2011-05-31
Pages: 3
Assignee
ULTRATECH, INC
3050 ZANKER ROAD, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Phase-Shift Mask with Assist Phase Regions
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.