Patent Assignment
Reel/Frame 026430/0545
Assignment of Assignor's Interest
Recorded: 2011-06-13
Pages: 3
Assignor
HONDA, MASANOBU
Executed: 2011-05-19
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus