Patent Assignment
Reel/Frame 026434/0053
Assignment of Assignor's Interest
Recorded: 2011-06-13
Pages: 8
Assignors
YASUI, KANJI
Executed: 2011-06-13
NISHIYAMA, HIROSHI
Executed: 2011-06-13
INOUE, YASUNOBU
Executed: 2011-06-13
USHIJIMA, MITSURU
Executed: 2011-06-13
IWABUCHI, KATSUHIKO
Executed: 2011-06-13
Assignees
NATIONAL UNIVERSITY CORPORATION NAGAOKA UNIVERSITY OF TECHNOLOGY
1603-1, KAMITOMIOKA-CHO, NAGAOKA-SHI,, NIIGATA, 940-2188, JAPAN
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method