Patent Assignment
Reel/Frame 026437/0302
Assignment of Assignor's Interest
Recorded: 2011-06-10
Pages: 4
Assignors
KAO, CHIEN-TEH
Executed: 2011-05-13
LAM, HYMAN W. H.
Executed: 2011-05-13
CHANG, MEI
Executed: 2011-05-13
OR, DAVID T.
Executed: 2011-05-16
DENNY, NICHOLAS R.
Executed: 2011-05-13
YUAN, XIAOXIONG
Executed: 2011-05-13
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Process Chamber Lid Design with Built-in Plasma Source for Short Lifetime Species