Patent Assignment
Reel/Frame 026450/0307
Assignment of Assignor's Interest
Recorded: 2011-05-25
Pages: 2
Assignors
YAMADA, AKIO
Executed: 2011-03-10
SAKAZAKI, TOMOHIRO
Executed: 2011-03-10
YASUDA, HIROSHI
Executed: 2011-03-12
Assignee
ADVANTEST CORPORATION
32-1, ASAHI-CHO 1-CHOME, NERIMA-KU, TOKYO, 179-0071, JAPAN
Covered Property
(1)
Electron beam lithography apparatus and electron beam lithography method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.