Patent Assignment
Reel/Frame 026454/0434
Assignment of Assignor's Interest
Recorded: 2011-06-17
Pages: 4
Assignors
YOSHIMURA, AKIHIRO
Executed: 2011-04-26
SATO, TETSUJI
Executed: 2011-04-27
HORIGUCHI, MASATO
Executed: 2011-04-26
WADA, NOBUHIRO
Executed: 2011-05-02
KOBAYASHI, MAKOTO
Executed: 2011-05-26
TSUJIMOTO, HIROSHI
Executed: 2011-05-02
TAMURA, JUN
Executed: 2011-05-09
NAOI, MAMORU
Executed: 2011-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus