Patent Assignment
Reel/Frame 026503/0317
Assignment of Assignor's Interest
Recorded: 2011-06-22
Pages: 2
Assignors
ISHIZUKA, AKIHIRO
Executed: 2011-05-27
YONEMITSU, YUTAKA
Executed: 2011-05-27
SASAGAWA, SHINYA
Executed: 2011-05-27
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device