Patent Assignment
Reel/Frame 026508/0013
Assignment of Assignor's Interest
Recorded: 2011-06-27
Pages: 3
Assignor
YAMAGISHI, TAKAYUKI
Executed: 2011-06-24
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Dual Section Module Having Shared and Unshared Mass Flow Controllers