Patent Assignment
Reel/Frame 026521/0388
Assignment of Assignor's Interest
Recorded: 2011-06-29
Pages: 4
Assignors
INADA, TAKAO
Executed: 2011-05-31
OKAMURA, NAOYUKI
Executed: 2011-05-30
YANO, HIDETSUGU
Executed: 2011-05-11
HACHIYA, YOSUKE
Executed: 2011-05-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method and Computer-Readable Storage Medium Storing Liquid Processing Program