Patent Assignment
Reel/Frame 026522/0709
Assignment of Assignor's Interest
Recorded: 2011-06-29
Pages: 2
Assignee
FUJITSU LIMITED
1-1, KAMIKODANAKA 4-CHOME, NAKAHARA-KU,, KAWASAKI-SHI, KANAGAWA, 211-8588, JAPAN
Covered Property
(1)
Pattern Forming Method, Method for Manufacturing Semiconductor Device, and Material for Forming Coating Layer of Resist Pattern