Patent Assignment
Reel/Frame 026534/0527
Assignment of Assignor's Interest
Recorded: 2011-06-29
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Control System of Substrate Processing Apparatus, Collecting Unit, Substrate Processing Apparatus and Control Method of the Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.