Patent Assignment
Reel/Frame 026541/0843
Assignment of Assignor's Interest
Recorded: 2011-07-05
Pages: 3
Assignor
YAMAMOTO, TAKASHI
Executed: 2011-05-25
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device