Patent Assignment
Reel/Frame 026548/0949
Assignment of Assignor's Interest
Recorded: 2011-07-06
Pages: 8
Assignors
FORREST, STEPHEN R.
Executed: 2011-06-28
XU, XIN
Executed: 2011-06-23
RENSHAW, CHRISTOPHER KYLE
Executed: 2011-06-30
Assignee
THE REGENTS OF THE UNIVERSITY OF MICHIGAN
1214 S. UNIVERSITY AVENUE, 2ND FLOOR, ANN ARBOR, MICHIGAN, 48104
Covered Property
(1)
System and Method of Forming Semiconductor Devices