Patent Assignment
Reel/Frame 026590/0095
Assignment of Assignor's Interest
Recorded: 2011-07-14
Pages: 2
Assignor
CHEONG, WOO-SEOK
Executed: 2011-01-26
Assignee
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
161, GAJEONG-DONG, YUSEONG-GU, DAEJEON, 305-700, KOREA, REPUBLIC OF
Covered Property
(1)
Thin Film Depositing Apparatus