Patent Assignment
Reel/Frame 026598/0571
Assignment of Assignor's Interest
Recorded: 2011-05-31
Pages: 3
Assignor
FUTURE VISION, INC.
Executed: 2011-05-26
Assignee
TOKYO ELECTRON, LTD.
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Electrostatic Chuck for Substrate Stage, Electrode Used for the Chuck, and Treating System Having the Chuck and Electrode
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.