Patent Assignment
Reel/Frame 026599/0449
Assignment of Assignor's Interest
Recorded: 2011-07-15
Pages: 3
Assignor
KIMBA, TOSHIFUMI
Executed: 2011-07-08
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU,, TOKYO, JAPAN
Covered Property
(1)
Method of Monitoring Progress of Substrate Polishing and Polishing Apparatus