Patent Assignment
Reel/Frame 026600/0178
Assignment of Assignor's Interest
Recorded: 2011-07-15
Pages: 2
Assignors
TSAI, CHUN HSIUNG
Executed: 2011-07-07
YU, XIONG-FEI
Executed: 2011-07-08
HUANG, YU-LIEN
Executed: 2011-07-08
LIN, DA-WEN
Executed: 2011-07-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Methods of Anneal After Deposition of Gate Layers