Patent Assignment
Reel/Frame 026602/0016
Assignment of Assignor's Interest
Recorded: 2011-07-15
Pages: 3
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Wafer-Supporting Device and Method for Producing Same