Patent Assignment
Reel/Frame 026611/0918
Assignment of Assignor's Interest
Recorded: 2011-07-19
Pages: 2
Assignee
HITACHI, LTD.
6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Mems Device and Method of Manufacturing Mems Device