Patent Assignment
Reel/Frame 026614/0766
Assignment of Assignor's Interest
Recorded: 2011-07-19
Pages: 3
Assignor
SINGH, HARMEET
Executed: 2011-07-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Electrostatic Chuck with Wafer Backside Plasma Assisted Dechuck