Patent Assignment
Reel/Frame 026615/0689
Assignment of Assignor's Interest
Recorded: 2011-07-19
Pages: 6
Assignors
KANDEL, DANIEL
Executed: 2011-07-19
LEVINSKI, VLADIMIR
Executed: 2011-07-19
COHEN, GUY
Executed: 2011-07-19
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Multi-Layer Overlay Metrology Target and Complimentary Overlay Metrology Measurement Systems