Patent Assignment
Reel/Frame 026617/0567
Assignment of Assignor's Interest
Recorded: 2011-07-19
Pages: 3
Assignors
AHN, SUNG MIN
Executed: 2011-06-21
JANG, SANG DON
Executed: 2011-06-21
SON, TAE KYU
Executed: 2011-06-21
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Maskless Exposure Apparatus and Method to Determine Exposure Start Position and Orientation in Maskless Lithography