Patent Assignment
Reel/Frame 026632/0793
Assignment of Assignor's Interest
Recorded: 2011-07-22
Pages: 2
Assignor
SINGH, HARMEET
Executed: 2011-07-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatus for Atomic Layer Etching