Patent Assignment
Reel/Frame 026634/0672
Assignment of Assignor's Interest
Recorded: 2011-07-22
Pages: 4
Assignors
ISHIBASHI, TOMOATSU
Executed: 2011-03-19
OGAWA, TAKAHIRO
Executed: 2011-03-19
SUGITA, KENICHI
Executed: 2011-03-31
KAJITA, SHINJI
Executed: 2011-04-12
FUKAYA, KOICHI
Executed: 2011-03-19
NAKAMURA, AKIRA
Executed: 2011-03-21
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Drying Apparatus, Substrate Drying Method and Control Program
Application:
13/022,979 →
Publication:
US 2011/0289795