Patent Assignment
Reel/Frame 026635/0120
Assignment of Assignor's Interest
Recorded: 2011-07-22
Pages: 2
Assignor
MODDERMAN, THEODORUS MARINUS
Executed: 2005-04-21
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method