Patent Assignment
Reel/Frame 026673/0064
Assignment of Assignor's Interest
Recorded: 2011-07-29
Pages: 3
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Property
(1)
Wafer Chucking System for Advanced Plasma Ion Energy Processing Systems
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.