Patent Assignment
Reel/Frame 043983/0966
Assignment of Assignor's Interest
Recorded: 2017-10-30
Pages: 17
Assignor
ADVANCED ENERGY INDUSTRIES, INC.
Executed: 2017-09-13
Assignee
AES GLOBAL HOLDINGS, PTE. LTD.
18 TAI SENG, SINGAPORE, 539775, SINGAPORE
Covered Properties
(33)
Method and Apparatus for Controlling Ion Energy Distribution
System, Method and Apparatus for Controlling Ion Energy Distribution
Current Threshold Response Mode for Arc Management
Methods and Apparatus for Applying Periodic Voltage Using Direct Current
Wafer Chucking System for Advanced Plasma Ion Energy Processing Systems
System, Method and Apparatus for Controlling Ion Energy Distribution of a Projected Plasma
System Level Power Delivery to a Plasma Processing Load
Methods and Apparatus for Sputtering Using Direct Current
Dual Beam Non-Contact Displacement Sensor
Systems and Methods for Calibrating a Switched Mode Ion Energy Distribution System
Method of Controlling the Switched Mode Ion Energy Distribution System
Adjustable Non-Dissipative Voltage Boosting Snubber Network
Passive Unipolar Referencing for Non-Isolated Inverters
Power Converter with Preemptive Protection
Impedance-Matching Network Using BJT Switches in Variable-Reactance Circuits
High Frequency Solid State Switching for Impedance Matching
Differing Boost Voltages Applied to Two or More Anodeless Electrodes for Plasma Processing
Three Terminal PIN Diode
Wide Dynamic Range Ion Energy Bias Control; Fast Ion Energy Switching; Ion Energy Control and a Pulsed Bias Supply; and a Virtual Front Panel
Arc Management with Voltage Reversal and Improved Recovery
Frequency Tuning System and Method for Finding a Global Optimum
Charge Removal from Electrodes in Unipolar Sputtering System
Adjustable Non-Dissipative Voltage Boosting Snubber Network for Achieving Large Boost Voltages
Reliable Plasma Ignition and Reignition
Capacitively Coupled Remote Plasma Source
Variable-Class Amplifier, System, and Method
Power Supply Device for Plasma Processing
Method for Controlling Ion Energy Distribution
Impedance Matching Network with High Frequency Switching
System Level Power Delivery to a Plasma Processing Load
Electrostatic Remote Plasma Source System and Method
Adjustable Non-Dissipative Voltage Boosting Snubber Network
Adjustable Non-Dissipative Voltage Boosting Snubber Network for Achieving Large Boost Voltages
Related Assignments
(19)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
May 25, 2010
From: HECKMAN, RANDY; BROUK, VICTOR
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 024439/0119 →
Assignment of Assignor's Interest
Sep 17, 2010
From: BROUK, VICTOR; HECKMAN, RANDY; HOFFMAN, DANIEL J.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 025004/0462 →
Assignment of Assignor's Interest
Jun 21, 2011
From: LARSON, SKIP B; NAUMAN, KENNETH E
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 026470/0323 →
Assignment of Assignor's Interest
Jun 29, 2011
From: NAUMAN, KENNETH E.; FINLEY, KENNETH; LARSON, SKIP B.; PELLEYMOUNTER, DOUG
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 026521/0576 →
Assignment of Assignor's Interest
Jul 29, 2011
From: HOFFMAN, DANIEL J.; BROUK, VICTOR; CARTER, DANIEL
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 026673/0739 →
Assignment of Assignor's Interest
Jul 29, 2011
From: BROUK, VICTOR; HOFFMAN, DANIEL J.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 026673/0064 →
Assignment of Assignor's Interest
Jan 12, 2012
From: BLACKBURN, THOMAS JOEL; MCINTYRE, THOMAS; TOMASEL, FERNANDO GUSTAVO
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 027526/0342 →
Assignment of Assignor's Interest
Mar 12, 2012
From: NAUMAN, KEN; WALDE, HENDRIK V.; CHRISTIE, DAVID J.; FRIES, BRUCE
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 027847/0593 →
Assignment of Assignor's Interest
Jun 4, 2012
From: HAW, THOMAS; KERCHECK, GARY
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 028314/0130 →
Assignment of Assignor's Interest
Aug 29, 2012
From: HOFFMAN, DANIEL J.; CARTER, DANIEL; BROUK, VICTOR
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 028871/0815 →
Assignment of Assignor's Interest
Aug 29, 2012
From: BROUK, VICTOR; HOFFMAN, DANIEL J.; CARTER, DANIEL
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 028871/0328 →
Assignment of Assignor's Interest
Nov 1, 2012
From: FINLEY, KENNETH W.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 029228/0939 →
Assignment of Assignor's Interest
Nov 9, 2012
From: HOFFMAN, DANIEL J.; CARTER, DANIEL; BROUK, VICTOR; HATTEL, WILLIAM J.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 029270/0278 →
Assignment of Assignor's Interest
Jan 22, 2013
From: SEYMOUR, ERIC; KRAMER, DUSTIN
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 029667/0943 →
Assignment of Assignor's Interest
May 3, 2013
From: WALDE, HENDRIK; FROST, DARYL
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 030346/0570 →
Assignment of Assignor's Interest
May 7, 2013
From: MASON, CHRISTOPHER C.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 030366/0880 →
Assignment of Assignor's Interest
May 13, 2013
From: FINLEY, KENNETH W.; CHRISTIE, DAVID
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 030402/0635 →
Assignment of Assignor's Interest
Feb 25, 2015
From: VAN ZYL, GIDEON; GUROV, GENNADY G.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 035031/0231 →
Assignment of Assignor's Interest
Oct 29, 2019
From: ADVANCED ENERGY INDUSTRIES, INC.; AES GLOBAL HOLDINGS, PTE, LTD.
To: SMA SOLAR TECHNOLOGY AG
Reel/Frame 050852/0816 →