Patent Assignment
Reel/Frame 026702/0102
Assignment of Assignor's Interest
Recorded: 2011-08-04
Pages: 3
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Control of Electrolyte Hydrodynamics for Efficient Mass Transfer During Electroplating