Patent Assignment
Reel/Frame 026714/0321
Assignment of Assignor's Interest
Recorded: 2011-08-08
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus for Maintaining a More Uniform Temperature During Substrate Processing