Patent Assignment
Reel/Frame 026718/0937
Assignment of Assignor's Interest
Recorded: 2011-08-09
Pages: 2
Assignor
YANAGIYA, YOSHIO
Executed: 2011-08-03
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Ac Power Supply for Sputtering Apparatus