Patent Assignment
Reel/Frame 026737/0076
Assignment of Assignor's Interest
Recorded: 2011-08-11
Pages: 6
Assignors
DEN BOEF, ARIE JEFFREY
Executed: 2011-07-26
VAN DER SCHAAR, MAURITS
Executed: 2011-07-21
FUCHS, ANDREAS
Executed: 2011-07-25
COOGANS, MARTYN JOHN
Executed: 2011-08-03
BHATTACHARYYA, KAUSTUVE
Executed: 2011-07-25
MORGAN, STEPHEN PETER
Executed: 2011-08-01
KUBIS, MICHAEL
Executed: 2011-07-21
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Determining an Overlay Error