Patent Assignment
Reel/Frame 026753/0795
Assignment of Assignor's Interest
Recorded: 2011-08-11
Pages: 12
Assignors
SILVEIRA, FERNANDO M
Executed: 2011-07-25
TAVASSOLI, HAMID
Executed: 2011-07-25
ZHOU, XIAOPING
Executed: 2011-07-25
NEVIL, SHANE C.
Executed: 2011-07-26
BUCHBERGER, DOUGLAS A
Executed: 2011-07-25
MAYS, BRAD L
Executed: 2011-06-07
TSONG, TINA
Executed: 2011-08-08
MAHADESWARASWAMY, CHETAN
Executed: 2011-07-15
PATTAR, YASHASWINI B.
Executed: 2011-07-14
NGUYEN, DUY D
Executed: 2011-07-25
MERRY, WALTER R
Executed: 2011-06-28
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Temperature Control in Plasma Processing Apparatus Using Pulsed Heat Transfer Fluid Flow