Patent Assignment
Reel/Frame 026754/0101
Assignment of Assignor's Interest
Recorded: 2011-08-16
Pages: 3
Assignors
BRET, TRISTAN
Executed: 2011-08-01
SPIES, PETRA
Executed: 2011-07-26
HOFMANN, THORSTEN
Executed: 2011-07-26
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, 07745 JENA, GERMANY
Covered Property
(1)
Method and Apparatus for Processing a Substrate with a Focused Particle Beam
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.