Patent Assignment
Reel/Frame 026759/0477
Assignment of Assignor's Interest
Recorded: 2011-08-16
Pages: 7
Assignors
SINGER, WOLFGANG
Executed: 2011-05-20
KWAN, YIM-BUN-PATRICK
Executed: 2011-05-20
SCHMIDT, STEFAN-WOLFGANG
Executed: 2011-06-15
EHM, DIRK HEINRICH
Executed: 2011-05-20
KRAUS, DIETER
Executed: 2011-05-23
WIESNER, STEFAN
Executed: 2011-07-19
KOEHLER, STEFAN
Executed: 2011-05-20
CZAP, ALMUT
Executed: 2011-06-08
CHUNG, HIN YIU ANTHONY
Executed: 2011-05-20
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Euv Lithography Device and Method for Processing an Optical Element